[Subject]
Micro-Electro-Mechanical Systems (MEMS)
[Content]
Summary of article(Diversity in MEMS Processing), MEMS Processing
[Why MEMS?]
* Reduction of power budget
* Faster devices
* Increased selectivity and sensitivity
* Improved accuracy and reliability
* Integration of the MEMS device with the integrated circuit becomes increasingly important for compactness and performance reasons.
* Allows for smaller packages and leads to a lower packaging and instrumentation cost.
* Processing MEMS above CMOS is the most promising approach for CMOS-MEMS integration.
[Conclusion]
Many companies related to MEMS are trying to combine MEMS with CMOS in order to make high performance devices today.
[Download]
Diversity_in_MEMS_Processing_PPT.7z
[Source Link]
article
http://www.rdmag.com/ShowPR.aspx?PUBCODE=014&ACCT=1400000100&ISSUE=0808&RELTYPE=FE&PRODCODE=00000000&PRODLETT=LM&CommonCount=0 (Diversity in MEMS Processing)
wikipedia
http://en.wikipedia.org/wiki/MEMS
http://en.wikipedia.org/wiki/Micropump
company
http://www.akustica.com/
http://www.debiotech.com/products/msys/mip.html
site
http://www.memsnet.org/mems/what-is.html (What is MEMS Technology?)
IEEE article
http://ieeexplore.ieee.org/Xplore/login.jsp?url=/iel5/4110094/4110095/04110130.pdf?tp=&isnumber=&arnumber=4110130 (CMOS-MEMS Integration: Why, How and What?)
etc.......
프리젠테이션 자료 입니다.
많은(?) 자료를 참고하여 프리젠테이션 자료를 만들었습니다. (Diversity in MEMS Processing) 요약을 하고 이것에 대한 프리젠테이션입니다. (마지막 IEEE article (CMOS-MEMS Integration: Why, How and What?) 좋은 자료 인 것 같네요..)
프리젠테이션 발표를 좀 못했네요. ㅡㅡ; (버벅거리고... 하고 싶은 말 .. 다 못했구...)
시간이 허락한다면 좋은 기사 또는 자료들을 포스트 하겠습니다.
태그 : MEMS





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